Statistics don't lie. The safest aircraft based on number of fatal accidents per million cycles are:
-MD 80/90: 0.22
-Airbus A320: 0.38
-Lockheed L1011: 0.49
-Airbus A300: 0.78
Least safe aircraft (fatal accidents/million cycles):
-Fokker F.28: 1.78
-Airbus A310: 1.59
-Boeing 747 (all models): 0.97
Now, some notes about these numbers. They are all up to date, including the most recent accidents. Keep in mind that some of these fatal accidents can't be attributed at all to the aircraft (terrorist activity etc) and for example this makes the 767's record worse than it should be.
I have not inluded the 777/A330/340 because they have been in service for less than ten years.
But these numbers don't tell the whole story, as others have mentioned, maintenance and crew training are also big factors. However, with the absence of the Concorde, all of these aircraft are employed by a diverse variety of operators, and it is my thinking that eventually maintenance and crew even out over all of the operators...so there is some relevance to the safety record of the aircraft model.
Now, some common misconceptions can be dispelled with these statistics. While the B747-400 is a very safe aircraft, the previous models didn't fare as well. And for the DC-10, most of the accidents are with the initial -10 model, leaving the -30 with an excellent safety record, despite being labelled a deathtrap by the "experts".
And of course, the Concorde number is so high because of the extremely low number of flights that that aircraft has flown.
My source is http://www.airsafe.com